Plasma-related products RF radical beam source IRFS-504
Chemically active radicals are formed by ICP-type RF discharge, and the flux is drawn out by differential pressure.
The discharge section and the extraction section are made of high-purity PBN, allowing for long-term stable operation even during the introduction of reactive gases, and enabling the generation of a clean atomic and radical beam. It has particularly proven effective as a nitrogen radical source, with a wealth of experience.
- Company：アリオス
- Price：Other
